论文标题
负泵：吸附机制和应用
NEG pumps: Sorption mechanisms and applications
论文作者
论文摘要
本文报告了负材料的主要物理和化学特性，吸附机制以及从高到极高真空的NEG泵的使用。
This paper reports the main physical and chemical properties of NEG materials, sorption mechanisms and use of NEG pumps from high to extreme high vacuums.
