论文标题

具有环形分区的微龙数组,用于高速随机轴向轴向聚焦

A micromirror array with annular partitioning for high-speed random-access axial focusing

论文作者

Ersumo, Nathan Tessema, Yalcin, Cem, Antipa, Nick, Pegard, Nicolas, Waller, Laura, Lopez, Daniel, Muller, Rikky

论文摘要

动态轴向聚焦功能最近在显微镜,增强/虚拟现实(AR/VR),自适应光学和材料处理中经历了广泛的融合。但是,现有的Varifocal工具的局限性继续困扰动员这种功能的光学系统的性能功能和操作开销。驾驶最小的繁重的工具(例如:液晶,弹性体或光氟透镜)的较低(〜100 Hz)刷新速率。相反,最快的设备牺牲了关键功能,例如其住宅能力(例如:声学梯度镜头或单层微机械镜),或者较低的工作开销(例如,可变形的镜子)。在这里,我们提出了一种通用随机轴向轴向聚焦设备,该设备通过采用低二分性微动物来利用偏置相位剖面的稳健性,从而桥接了这些先前相互冲突的高速,住宅能力和轻量级驱动器的特征。从几何学上讲,该设备由直径为8.2 mm的活塞运动阵列和48个UM-Pitch微型像素像素,可为比1 100 nm的波长提供2PI相位转换,在64.8 US中的10-90%沉降(即15.44 kHz恢复率)。对于驱动方案,将像素电划分为32个环,该驱动方案可以通过圆形对称性进行相结合的操作,并且每个通道需要少于30 V。光学实验证明了阵列的广泛焦点范围,具有靶向29个不同的可分辨深层平面的测量能力。总体而言,所提出的阵列的特征为解决瓶颈应用的紧凑,直接方法提供了潜力,包括神经生物学中的高通量单细胞靶向以及在AR/VR中传递密集的3D视觉信息。

Dynamic axial focusing functionality has recently experienced widespread incorporation in microscopy, augmented/virtual reality (AR/VR), adaptive optics, and material processing. However, the limitations of existing varifocal tools continue to beset the performance capabilities and operating overhead of the optical systems that mobilize such functionality. The varifocal tools that are the least burdensome to drive (ex: liquid crystal, elastomeric or optofluidic lenses) suffer from low (~ 100 Hz) refresh rates. Conversely, the fastest devices sacrifice either critical capabilities such as their dwelling capacity (ex: acoustic gradient lenses or monolithic micromechanical mirrors) or low operating overhead (e.g., deformable mirrors). Here, we present a general-purpose random-access axial focusing device that bridges these previously conflicting features of high speed, dwelling capacity and lightweight drive by employing low-rigidity micromirrors that exploit the robustness of defocusing phase profiles. Geometrically, the device consists of an 8.2 mm diameter array of piston-motion and 48 um-pitch micromirror pixels that provide 2pi phase shifting for wavelengths shorter than 1 100 nm with 10-90 % settling in 64.8 us (i.e., 15.44 kHz refresh rate). The pixels are electrically partitioned into 32 rings for a driving scheme that enables phase-wrapped operation with circular symmetry and requires less than 30 V per channel. Optical experiments demonstrated the array's wide focusing range with a measured ability to target 29 distinct, resolvable depth planes. Overall, the features of the proposed array offer the potential for compact, straightforward methods of tackling bottlenecked applications including high-throughput single-cell targeting in neurobiology and the delivery of dense 3D visual information in AR/VR.

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